超精密气浮轴承平台
Specifications
| AXIS | Futures | Unite | Measuring Specifications |
|---|---|---|---|
|
Top Ari-Bearing |
Effective stroke | ㎜ | 580 |
| Maximum speed | ㎜ | 580 | |
| ACCelation | ㎨ | 5 | |
| Straightness | ㎛ | ±0.54(450㎜) | |
| Flatness | ㎛ | ±0.54(450㎜) | |
| Positioning accuracy | ㎛ | 0.37(550㎜) | |
| BI-directional repeatability | ㎛ | ±0.15(550㎜) | |
| Pitch error | arcsec | 4.27(540㎜) | |
| Yaw error | arcsec | 0.47(550㎜) | |
|
Bottom LM-GUIDE |
Effective stroke | ㎜ | 470 |
| Maximum speed | ㎜/sec | 600 | |
| ACCelation | ㎨ | 5 | |
| Straightness | ㎛ | ±0.97(450㎜) | |
| Flatness | ㎛ | ±0.80(450㎜) | |
| Positioning accuracy | ㎛ | 0.53(450㎜) | |
| BI-directional repeatability | ㎛ | ±0.47(450㎜) | |
| In-position stability | ㎛ | ||
| arcsec | ㎛ | 8.25(450㎜), 4.87(340㎜) | |
| Yaw arror | arcsec | 2.87(450㎜) | |
| XY | Orthogonality | arcsec | 2.739 |
超精密 Motion Stage for FPD/Semiconductor
Bearing 类型 of Stage: Air Bearing System
Laser Applications
· Laser System: Cutting Head + Scanner System
超精密气浮轴承平台
- 超精密气浮轴承平台
- 通过使用真空预压多孔气浮轴承提高平台移送真直度及pitch error
- 通过测量调整Yaw Error 及真直度
- 高负载量 / 高动刚性
- 超精密 精密度及反复度Ultra-precision Accuracy and Repeatability
- 应用领域 : LCD/OLED 激光制程, 检测设备, 微细加工
超精密气浮轴承平台
SiC (Silicon Carbide) 陶瓷为基础的 Motion Stage
Bearing 种类 / Scale / Type of Bearing /规模/ 隔离系统
- Bearing: 空气 / 吸入 Air Bearing系统
- 规模: Laser 规模
- 隔离系统: Active
超精密气浮轴承平台
- SiC 陶瓷为基础的Stage
- 空气真空和气浮轴承系统的结合
- 通过激光测定计, 独立式系统运行
| Net travel range | > step axis : 500㎜ |
|---|---|
| > step axis : 400㎜ | |
| Max continuous velocity(rate payload) | 400㎜/s |
| Max acceleration(rate payload) | 1.0G |
| Straighness & Flatness, Scan axis | ± 0.1㎛ @ 10㎜ |
| ± 0.5㎛ @ 310㎜ | |
| Position accuracy | ± 0.5㎛ @ 310㎜ |
| BI-directional repeatability(long) | ± 0.1㎛ @ 310㎜ |
| Pich, Roll & Yaw | 2 arc-sec |
| Orthogonality | 1 arc-sec |
| Rated payload | > 15kg, scan axis |
| First natural frequency | > 310Hz |
| In-position stability(on-air) | <± 40㎜ |
| Move profile information | Step move of 4.5㎜ |
| Time to make 4.5㎜ step = 0.11sec | |
| Scan at constant velocity over 300㎜ |